Palavra-chave: SILICON NITRIDE

MICROFABRICATION MICRO RING RESONATORS FABRICATION PROCESS MEMS PLASMA ETCHING ELECTRON CYCLOTRON RESONANCE PLASMA OPTICAL PROPERTIES MICROMACHINING PLASMA MECHANICAL ALLOYING SILICON OXYNITRIDE POWDER METALLURGY SILICON ALUMINIUM NITRIDE SELECTIVITY PASSIVATION MICRO RING ECR ECR-CVD FIELD OXIDATION RESONATORS CHEMICAL VAPOR DEPOSITION ISOTROPIC SILICON DIOXIDE HETEROSTRUCTURE TRANSISTORS ETCHING SENSOR RING RESONATOR FILMES FINOS RAMAN MIS DEVICES ALUMINIUM MATRIX COMPOSITES FABRICATION