Palavra-chave: SILICON NITRIDE

SILICON DIOXIDE MICRO RING RESONATORS RING RESONATOR ELECTRON CYCLOTRON RESONANCE PLASMA ISOTROPIC POWDER METALLURGY SILICON SELECTIVITY HETEROSTRUCTURE TRANSISTORS ALUMINIUM NITRIDE FIELD OXIDATION ETCHING MICROFABRICATION ECR CHEMICAL VAPOR DEPOSITION MICROMACHINING MICRO RING ECR-CVD MEMS MECHANICAL ALLOYING FABRICATION PROCESS RESONATORS PLASMA ETCHING SENSOR FABRICATION OPTICAL PROPERTIES ALUMINIUM MATRIX COMPOSITES FILMES FINOS PLASMA MIS DEVICES SILICON OXYNITRIDE PASSIVATION RAMAN