Palavra-chave: SILICON NITRIDE

SELECTIVITY ETCHING MEMS MICROMACHINING SILICON DIOXIDE PLASMA RAMAN MECHANICAL ALLOYING MICRO RING RESONATORS FABRICATION OPTICAL PROPERTIES SENSOR ELECTRON CYCLOTRON RESONANCE PLASMA HETEROSTRUCTURE TRANSISTORS MIS DEVICES ECR MICRO RING FABRICATION PROCESS RING RESONATOR CHEMICAL VAPOR DEPOSITION PLASMA ETCHING MICROFABRICATION ALUMINIUM MATRIX COMPOSITES RESONATORS SILICON PASSIVATION FIELD OXIDATION POWDER METALLURGY ALUMINIUM NITRIDE ECR-CVD ISOTROPIC FILMES FINOS SILICON OXYNITRIDE