Palavra-chave: SILICON NITRIDE

FILMES FINOS OPTICAL PROPERTIES HETEROSTRUCTURE TRANSISTORS MICROMACHINING SILICON MICRO RING RESONATORS MICROFABRICATION ELECTRON CYCLOTRON RESONANCE PLASMA ECR-CVD ISOTROPIC PLASMA CHEMICAL VAPOR DEPOSITION SELECTIVITY PLASMA ETCHING RING RESONATOR RESONATORS SILICON DIOXIDE RAMAN MEMS FABRICATION PROCESS ALUMINIUM NITRIDE MECHANICAL ALLOYING SENSOR FIELD OXIDATION PASSIVATION MICRO RING SILICON OXYNITRIDE FABRICATION ECR POWDER METALLURGY ALUMINIUM MATRIX COMPOSITES MIS DEVICES ETCHING