Palavra-chave: ETCHING

GAAS IN CCL4-N2 A-C:H THIN FILMS ANISOTROPY SI-C -DESORPTION III-V COMPOUND SEMICONDUCTORS MEAN DIAMETER MICROFABRICATION GAAS IC TECNOLOGY MODEL ADHESION ELECTRON CYCLOTRON RESONANCE PLASMA PT THIN FILMS MICROMACHINING GLASS MICROSHEAR BOND STRENGTH TUNGSTEN SILICON NITRIDE CERAMIC SURFACE DENSITY FISSION TRACK THERMOCHRONOLOGY HYDROFLUORIC ACID CONCENTRATION PLASMA APATITE ION TRACKS ECR PHYSICOCHEMICAL MECHANISM MUSCOVITE SEMICONDUCTORS SILICON INTERLAYER SILÍCIO POROSO BIO-MEDICAL APPLICATIONS MICROSCOPIA ELETRÔNICA DE TRANSMISSÃO SELECTIVITY LASER REFLECTOMETRY PLASMA ETCHING ANNEALING