Palavra-chave: ETCHING

MICROFABRICATION PT THIN FILMS SEMICONDUCTORS THERMOCHRONOLOGY SILICON INTERLAYER ION TRACKS ELECTRON CYCLOTRON RESONANCE PLASMA PLASMA ETCHING MICROMACHINING PLASMA FISSION TRACK ADHESION GLASS ANNEALING SILÍCIO POROSO SURFACE DENSITY GAAS IC TECNOLOGY MICROSHEAR BOND STRENGTH A-C:H THIN FILMS GAAS IN CCL4-N2 TUNGSTEN ANISOTROPY SELECTIVITY SI-C -DESORPTION ECR MODEL III-V COMPOUND SEMICONDUCTORS CERAMIC MUSCOVITE LASER REFLECTOMETRY MICROSCOPIA ELETRÔNICA DE TRANSMISSÃO PHYSICOCHEMICAL MECHANISM MEAN DIAMETER BIO-MEDICAL APPLICATIONS HYDROFLUORIC ACID CONCENTRATION APATITE SILICON NITRIDE