Palavra-chave: ETCHING

ANNEALING SURFACE DENSITY III-V COMPOUND SEMICONDUCTORS SELECTIVITY FISSION TRACK MICROMACHINING TUNGSTEN GAAS IC TECNOLOGY BIO-MEDICAL APPLICATIONS PLASMA APATITE HYDROFLUORIC ACID CONCENTRATION ION TRACKS SILÍCIO POROSO GAAS IN CCL4-N2 MUSCOVITE ADHESION PT THIN FILMS ELECTRON CYCLOTRON RESONANCE PLASMA MICROSCOPIA ELETRÔNICA DE TRANSMISSÃO ECR ANISOTROPY SI-C -DESORPTION LASER REFLECTOMETRY A-C:H THIN FILMS PLASMA ETCHING MICROFABRICATION MEAN DIAMETER MICROSHEAR BOND STRENGTH MODEL SILICON INTERLAYER THERMOCHRONOLOGY SEMICONDUCTORS GLASS CERAMIC SILICON NITRIDE PHYSICOCHEMICAL MECHANISM