Palavra-chave: ETCHING

MEAN DIAMETER GLASS ADHESION FISSION TRACK ELECTRON CYCLOTRON RESONANCE PLASMA SELECTIVITY APATITE MUSCOVITE THERMOCHRONOLOGY A-C:H THIN FILMS HYDROFLUORIC ACID CONCENTRATION ION TRACKS ECR MICROMACHINING GAAS IN CCL4-N2 SILICON NITRIDE SILÍCIO POROSO ANISOTROPY SURFACE DENSITY LASER REFLECTOMETRY ANNEALING PHYSICOCHEMICAL MECHANISM TUNGSTEN PLASMA ETCHING III-V COMPOUND SEMICONDUCTORS SEMICONDUCTORS MICROSHEAR BOND STRENGTH CERAMIC MICROSCOPIA ELETRÔNICA DE TRANSMISSÃO GAAS IC TECNOLOGY PLASMA SILICON INTERLAYER PT THIN FILMS BIO-MEDICAL APPLICATIONS MODEL MICROFABRICATION SI-C -DESORPTION