Palavra-chave: THIN FILM

ION IMPLANTATION ARGON DIAMOND FILM DC GLOW DISCHARGE RF GLOW DISCHARGE ESPECTROSCOPIA INFRAVERMELHA HEXAMETILDISILOXANE PLASMA POLYMERIZATION OPTICAL GAP EEECVD IRRAS TUNGSTEN OXIDE AMORPHOUS CARBON HFMOD PLASMA POLYMER PROPANE REFRACTIVE INDEX ELECTRICAL CONDUCTIVITY INFRARED SPECTROSCOPY METHANOL RF DISCHARGE RBS IMPEDANCE SPECTROSCOPY XPS ÓXIDO DE MOLIBDÊNIO AMORPHOUS HYDROGENATED CARBON GOLD PLASMA RF VANADIUM OXIDE ÓXIDO DE TUNGSTÊNIO OPTICAL EMISSION SPECTROSCOPY GLOW DISCHARGE CARBON NITRIDE PERYLENE CHEMICAL VAPOR DEPOSITION FLUORINE ETHANE ELECTRON EMISSION BERREMAN EFFECT ACETYLENE NITROGEN ORGANOSILICONE MOLIBDENUN OXIDE HEXAMETHYLDISILAZANE TITANIUM OXIDE PECVD ION IRRADIATION ELECTRICAL MEASUREMENT OXYGEN HEXAMETIL-DISILOXANO CVD SULFUR HEXAFLUORIDE