Palavra-chave: THIN FILM

CARBON NITRIDE OXYGEN ACETYLENE AMORPHOUS CARBON ION IMPLANTATION DIAMOND FILM ELECTRICAL CONDUCTIVITY OPTICAL EMISSION SPECTROSCOPY MOLIBDENUN OXIDE ÓXIDO DE TUNGSTÊNIO HEXAMETHYLDISILAZANE HEXAMETIL-DISILOXANO HFMOD INFRARED SPECTROSCOPY PLASMA POLYMER IMPEDANCE SPECTROSCOPY PROPANE ARGON BERREMAN EFFECT XPS ETHANE ELECTRICAL MEASUREMENT RF DISCHARGE PERYLENE VANADIUM OXIDE RF GLOW DISCHARGE ELECTRON EMISSION SULFUR HEXAFLUORIDE IRRAS CHEMICAL VAPOR DEPOSITION ION IRRADIATION REFRACTIVE INDEX METHANOL ORGANOSILICONE RBS AMORPHOUS HYDROGENATED CARBON CVD PECVD ESPECTROSCOPIA INFRAVERMELHA TITANIUM OXIDE GOLD NITROGEN FLUORINE GLOW DISCHARGE EEECVD TUNGSTEN OXIDE OPTICAL GAP HEXAMETILDISILOXANE DC GLOW DISCHARGE PLASMA POLYMERIZATION PLASMA RF ÓXIDO DE MOLIBDÊNIO