Palavra-chave: THIN FILM

AMORPHOUS CARBON FLUORINE ESPECTROSCOPIA INFRAVERMELHA HEXAMETILDISILOXANE IMPEDANCE SPECTROSCOPY ETHANE PLASMA POLYMERIZATION METHANOL AMORPHOUS HYDROGENATED CARBON SULFUR HEXAFLUORIDE RBS RF GLOW DISCHARGE OPTICAL GAP ION IRRADIATION ARGON ORGANOSILICONE PLASMA RF REFRACTIVE INDEX ÓXIDO DE TUNGSTÊNIO TITANIUM OXIDE ACETYLENE GLOW DISCHARGE HFMOD DIAMOND FILM DC GLOW DISCHARGE TUNGSTEN OXIDE VANADIUM OXIDE INFRARED SPECTROSCOPY ELECTRON EMISSION OPTICAL EMISSION SPECTROSCOPY BERREMAN EFFECT CVD PECVD NITROGEN ION IMPLANTATION PLASMA POLYMER CHEMICAL VAPOR DEPOSITION PROPANE ELECTRICAL CONDUCTIVITY HEXAMETHYLDISILAZANE ÓXIDO DE MOLIBDÊNIO GOLD RF DISCHARGE MOLIBDENUN OXIDE CARBON NITRIDE EEECVD IRRAS HEXAMETIL-DISILOXANO ELECTRICAL MEASUREMENT PERYLENE XPS OXYGEN