Palavra-chave: THIN FILM

PLASMA POLYMER ÓXIDO DE TUNGSTÊNIO HEXAMETIL-DISILOXANO IRRAS ARGON HFMOD MOLIBDENUN OXIDE INFRARED SPECTROSCOPY VANADIUM OXIDE DC GLOW DISCHARGE PERYLENE RF GLOW DISCHARGE ION IMPLANTATION ACETYLENE XPS ELECTRICAL CONDUCTIVITY PROPANE ORGANOSILICONE OXYGEN OPTICAL GAP RF DISCHARGE GOLD METHANOL IMPEDANCE SPECTROSCOPY HEXAMETHYLDISILAZANE BERREMAN EFFECT ELECTRON EMISSION EEECVD ION IRRADIATION CHEMICAL VAPOR DEPOSITION PECVD CVD FLUORINE HEXAMETILDISILOXANE NITROGEN SULFUR HEXAFLUORIDE PLASMA RF AMORPHOUS CARBON DIAMOND FILM GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY PLASMA POLYMERIZATION AMORPHOUS HYDROGENATED CARBON RBS TUNGSTEN OXIDE TITANIUM OXIDE REFRACTIVE INDEX ÓXIDO DE MOLIBDÊNIO ETHANE ESPECTROSCOPIA INFRAVERMELHA ELECTRICAL MEASUREMENT CARBON NITRIDE