Palavra-chave: ION IMPLANTATION

ACTIVATION HEXAMETIL-DISILOXANO X-RAY DIFFRACTION GLOW DISCHARGE BENZENE ACETYLENE OPTICAL GAP GAAS REFRACTIVE INDEX ELECTRICAL CONDUCTIVITY MOLECULAR STRUCTURE NITROGEN ION THIN FILM ELECTRICAL RESISTIVITY ANNEALING NANOCLUSTER GE DIELECTRIC CONSTANT SILICON DIOXIDE PLASMA POLYMER NITRIDING CARBON NITRIDE FILM INFRARED SPECTROSCOPY ARGON ION MESFET FILMES FINOS RTA