Palavra-chave: ION IMPLANTATION

RTA ELECTRICAL RESISTIVITY CARBON NITRIDE FILM NANOCLUSTER GE ACETYLENE BENZENE ELECTRICAL CONDUCTIVITY GAAS HEXAMETIL-DISILOXANO DIELECTRIC CONSTANT INFRARED SPECTROSCOPY PLASMA POLYMER FILMES FINOS SILICON DIOXIDE ANNEALING ACTIVATION X-RAY DIFFRACTION THIN FILM REFRACTIVE INDEX NITROGEN ION NITRIDING MESFET GLOW DISCHARGE OPTICAL GAP ARGON ION MOLECULAR STRUCTURE