Palavra-chave: ION IMPLANTATION

ARGON ION RTA DIELECTRIC CONSTANT BENZENE X-RAY DIFFRACTION OPTICAL GAP CARBON NITRIDE FILM ANNEALING GAAS ACETYLENE REFRACTIVE INDEX GLOW DISCHARGE NITROGEN ION INFRARED SPECTROSCOPY PLASMA POLYMER ELECTRICAL CONDUCTIVITY ELECTRICAL RESISTIVITY NITRIDING SILICON DIOXIDE NANOCLUSTER GE FILMES FINOS ACTIVATION MESFET HEXAMETIL-DISILOXANO THIN FILM MOLECULAR STRUCTURE