Palavra-chave: ION IMPLANTATION

PLASMA POLYMER HEXAMETIL-DISILOXANO SILICON DIOXIDE INFRARED SPECTROSCOPY BENZENE DIELECTRIC CONSTANT ACETYLENE ELECTRICAL CONDUCTIVITY OPTICAL GAP ELECTRICAL RESISTIVITY GAAS MOLECULAR STRUCTURE NITRIDING X-RAY DIFFRACTION RTA GLOW DISCHARGE ACTIVATION CARBON NITRIDE FILM THIN FILM ANNEALING NITROGEN ION REFRACTIVE INDEX ARGON ION MESFET FILMES FINOS NANOCLUSTER GE