Palavra-chave: PLASMA POLYMER

REFRACTIVE INDEX OPTICAL EMISSION SPECTROSCOPY INFRARED SPECTROSCOPY GLOW DISCHARGE OPTICAL GAP TRANSMISSION ELECTRON MICROSCOPY PLASMA ETCHING ION IRRADIATION MOLECULAR STRUCTURE ELECTRICAL CONDUCTIVITY RF GLOW DISCHARGE THIN FILM DC GLOW DISCHARGE ACETYLENE NITROGEN TETRAMETHYLSILANE RF DISCHARGE BENZENE ETHANE PROPANE STRUCTURAL PROPERTIES OXYGEN OPTICAL PROPERTIES SULFUR HEXAFLUORIDE METHANOL ACETONE DESORPTION CN SPECIES CO SPECIES ION IMPLANTATION ARGON ION NITROGEN ION