Palavra-chave: PLASMA POLYMER

OPTICAL EMISSION SPECTROSCOPY INFRARED SPECTROSCOPY GLOW DISCHARGE REFRACTIVE INDEX OPTICAL GAP TRANSMISSION ELECTRON MICROSCOPY ELECTRICAL CONDUCTIVITY PLASMA ETCHING ION IRRADIATION MOLECULAR STRUCTURE ACETYLENE RF GLOW DISCHARGE THIN FILM DC GLOW DISCHARGE RF DISCHARGE NITROGEN TETRAMETHYLSILANE BENZENE ETHANE PROPANE STRUCTURAL PROPERTIES OPTICAL PROPERTIES OXYGEN SULFUR HEXAFLUORIDE METHANOL ACETONE DESORPTION CN SPECIES CO SPECIES ARGON ION ION IMPLANTATION NITROGEN ION