Palavra-chave: PLASMA POLYMER

REFRACTIVE INDEX GLOW DISCHARGE INFRARED SPECTROSCOPY OPTICAL GAP OPTICAL EMISSION SPECTROSCOPY TRANSMISSION ELECTRON MICROSCOPY ELECTRICAL CONDUCTIVITY PLASMA ETCHING MOLECULAR STRUCTURE ION IRRADIATION THIN FILM DC GLOW DISCHARGE ACETYLENE RF GLOW DISCHARGE NITROGEN TETRAMETHYLSILANE RF DISCHARGE BENZENE PROPANE ETHANE OXYGEN STRUCTURAL PROPERTIES OPTICAL PROPERTIES ACETONE SULFUR HEXAFLUORIDE METHANOL DESORPTION CO SPECIES CN SPECIES ION IMPLANTATION NITROGEN ION ARGON ION