Palavra-chave: PLASMA POLYMER

GLOW DISCHARGE REFRACTIVE INDEX OPTICAL GAP INFRARED SPECTROSCOPY OPTICAL EMISSION SPECTROSCOPY TRANSMISSION ELECTRON MICROSCOPY PLASMA ETCHING MOLECULAR STRUCTURE ION IRRADIATION ELECTRICAL CONDUCTIVITY DC GLOW DISCHARGE RF GLOW DISCHARGE THIN FILM ACETYLENE TETRAMETHYLSILANE RF DISCHARGE NITROGEN BENZENE ETHANE PROPANE OXYGEN OPTICAL PROPERTIES STRUCTURAL PROPERTIES ACETONE METHANOL SULFUR HEXAFLUORIDE DESORPTION CN SPECIES CO SPECIES ARGON ION ION IMPLANTATION NITROGEN ION