Palavra-chave: PLASMA POLYMERIZATION

PLASMA RF SILICON-CONTAINING POLYMERS GLOW DISCHARGE SULFUR HEXAFLUORIDE BENZENE FLUORINATED POLYNER METHANOL THIN FILM MOLECULAR STRUCTURE FLUORINE ETHANOL NITROGEN OXYGEN FTIR ION IRRADIATION LO-TO MODES OPTICAL EMISSION SPECTROSCOPY EPR CARBON NITRIDE FILM