Palavra-chave: OPTICAL EMISSION SPECTROSCOPY

PLASMA POLYMER INFRARED SPECTROSCOPY AMORPHOUS FILM ELECTRON CYCLOTRON RESONANCE PLASMA OXYGEN OPTICAL GAP HELIUM HEXAMETHYLDISILOXANE MOLECULAR STRUCTURE PECVD FLUORINE PLASMA DEPOSITION NITROGEN AMORPHOUS CARBON FTIR TRANSMISSION ELECTRON MICROSCOPY GLOW DISCHARGE THIN FILM PLASMA POLYMERIZATION ACTINOMETRY REFRACTIVE INDEX DYNAMIC ACTINOMETRY FILMES FINOS CARBON NITRIDE