Palavra-chave: OPTICAL EMISSION SPECTROSCOPY

PLASMA DEPOSITION PLASMA POLYMERIZATION OPTICAL GAP AMORPHOUS FILM MOLECULAR STRUCTURE HELIUM AMORPHOUS CARBON PLASMA POLYMER REFRACTIVE INDEX INFRARED SPECTROSCOPY ELECTRON CYCLOTRON RESONANCE PLASMA FTIR DYNAMIC ACTINOMETRY GLOW DISCHARGE CARBON NITRIDE FLUORINE HEXAMETHYLDISILOXANE NITROGEN THIN FILM PECVD TRANSMISSION ELECTRON MICROSCOPY OXYGEN ACTINOMETRY FILMES FINOS