Palavra-chave: GLOW DISCHARGE

PLASMA-SURFACE INTERACTIONS PLASMA POLYMER HYDROGEN EVOLUTION ARGON INFRARED SPECTROSCOPY BENZENE DESORPTION AMORPHOUS SILICON FILMS ION IMPLANTATION ELECTRICAL CONDUCTIVITY CN SPECIES HYDROCARBON HOLOGRAPHIC EXPOSURE POLYMER FILM OXYGEN OPTICAL GAP GOLD METHANOL BERREMAN EFFECT FLUORINATED POLYNER HELIUM MOLECULAR STRUCTURE HEXAMETHYLDISILOXANE HEXAMETILDISILOXANE SULFUR HEXAFLUORIDE NITROGEN AMORPHOUS CARBON CARBON NITRIDE FILM OPTICAL EMISSION SPECTROSCOPY THIN FILM PLASMA POLYMERIZATION CO SPECIES RUTHERFORD BACKSCATTERING SPECTROSCOPY AMORPHOUS CARBON FILMS TITANIUM OXIDE PLASMA ETCHING SCANNING ELECTRON MICROSCOPY REFRACTIVE INDEX THOLINS TITAN GAS-EVOLVING ELECTRODE TRANSMISSION ELECTRON MICROSCOPY