Palavra-chave: GLOW DISCHARGE

OXYGEN CARBON NITRIDE FILM POLYMER FILM BENZENE AMORPHOUS CARBON ION IMPLANTATION ELECTRICAL CONDUCTIVITY HOLOGRAPHIC EXPOSURE OPTICAL EMISSION SPECTROSCOPY FLUORINATED POLYNER DESORPTION TITAN INFRARED SPECTROSCOPY RUTHERFORD BACKSCATTERING SPECTROSCOPY PLASMA POLYMER GAS-EVOLVING ELECTRODE ARGON PLASMA-SURFACE INTERACTIONS BERREMAN EFFECT HYDROCARBON SULFUR HEXAFLUORIDE THIN FILM REFRACTIVE INDEX METHANOL AMORPHOUS CARBON FILMS TITANIUM OXIDE TRANSMISSION ELECTRON MICROSCOPY GOLD HELIUM NITROGEN AMORPHOUS SILICON FILMS HEXAMETHYLDISILOXANE SCANNING ELECTRON MICROSCOPY OPTICAL GAP HEXAMETILDISILOXANE PLASMA POLYMERIZATION CN SPECIES CO SPECIES PLASMA ETCHING HYDROGEN EVOLUTION THOLINS MOLECULAR STRUCTURE