Palavra-chave: GLOW DISCHARGE

AMORPHOUS CARBON HYDROCARBON HEXAMETILDISILOXANE DESORPTION PLASMA POLYMERIZATION METHANOL PLASMA ETCHING TITAN SULFUR HEXAFLUORIDE BENZENE AMORPHOUS SILICON FILMS CO SPECIES OPTICAL GAP CARBON NITRIDE FILM ARGON REFRACTIVE INDEX SCANNING ELECTRON MICROSCOPY TITANIUM OXIDE PLASMA-SURFACE INTERACTIONS THOLINS FLUORINATED POLYNER CN SPECIES HOLOGRAPHIC EXPOSURE INFRARED SPECTROSCOPY RUTHERFORD BACKSCATTERING SPECTROSCOPY GAS-EVOLVING ELECTRODE OPTICAL EMISSION SPECTROSCOPY BERREMAN EFFECT NITROGEN ION IMPLANTATION PLASMA POLYMER ELECTRICAL CONDUCTIVITY GOLD HYDROGEN EVOLUTION AMORPHOUS CARBON FILMS TRANSMISSION ELECTRON MICROSCOPY HEXAMETHYLDISILOXANE THIN FILM POLYMER FILM OXYGEN HELIUM MOLECULAR STRUCTURE