Palavra-chave: GLOW DISCHARGE

ION IMPLANTATION ARGON TITAN RUTHERFORD BACKSCATTERING SPECTROSCOPY PLASMA-SURFACE INTERACTIONS HEXAMETILDISILOXANE FLUORINATED POLYNER AMORPHOUS CARBON FILMS PLASMA POLYMERIZATION OPTICAL GAP HYDROGEN EVOLUTION CO SPECIES MOLECULAR STRUCTURE AMORPHOUS CARBON BENZENE HELIUM SCANNING ELECTRON MICROSCOPY PLASMA POLYMER REFRACTIVE INDEX DESORPTION ELECTRICAL CONDUCTIVITY INFRARED SPECTROSCOPY METHANOL GAS-EVOLVING ELECTRODE HOLOGRAPHIC EXPOSURE GOLD CARBON NITRIDE FILM THOLINS OPTICAL EMISSION SPECTROSCOPY HEXAMETHYLDISILOXANE PLASMA ETCHING BERREMAN EFFECT THIN FILM NITROGEN POLYMER FILM TITANIUM OXIDE HYDROCARBON TRANSMISSION ELECTRON MICROSCOPY CN SPECIES AMORPHOUS SILICON FILMS OXYGEN SULFUR HEXAFLUORIDE